Vacuum Heating Assemblies
Metal Heater Plate
Metal heater plates with integrated heating and temperature-sensing components, balancing mechanical strength, thermal response and manufacturing cost.
PRODUCT FEATURES
Features
- 01
High mechanical strength
- 02
Fast thermal response
- 03
Integrated heating, temperature sensing and interface design
APPLICATION
Applications
For selected etching, thin-film deposition and specialty vacuum heating processes.
SPECIFICATIONS
Specifications
Information below is based on our published company brochure. Final specifications are subject to project drawings and technical confirmation.
- Customization
- Chamber geometry, RF frequency and water, electrical and gas interfaces
- Temperature Control
- Multi-zone control and thermocouples available
- Structural Materials
- Selected for the operating conditions
CUSTOMIZED SOLUTIONS