Products & Services
Core components for vacuum coating equipment, with products and custom machining services for photovoltaics, semiconductors, display panels and automation.
01 / CARRIER PLATES & FIXTURES
Carriers & Fixtures
Design, machining and support for carbon-carbon, graphite and metal carriers and fixtures used in PECVD, PVD, glass coating and perovskite processes.
PECVD Carbon-Carbon Carriers
Carbon-carbon composite carriers for heterojunction solar cell PECVD coating equipment.
PECVD Carbon-Carbon Carrier (2-Section)
Designed for heterojunction solar cell PECVD coating equipment, with customization for 182 / 210 mm wafers and other formats.
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PECVD Carbon-Carbon Carrier (4-Section)
Large-format modular structure balances loading efficiency, flatness and stability under vacuum conditions.
Explore ProductPVD Metal Carriers
Four-section, six-section and half-cell / cut-cell loading configurations.
PVD Metal Carrier (4-Section)
For PVD coating processes, customized to chamber dimensions, wafer formats and loading methods.
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PVD Metal Carrier (6-Section)
Structural design, precision machining and surface treatment for higher loading capacity.
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PVD Half-Cell / Cut-Cell Carrier
Developed for half-cell and cut-cell processes, with support for different formats and automated loading and unloading.
Explore ProductGlass Coating Carriers
Horizontal and vertical carriers for glass coating.
Glass Coating Carrier (Horizontal)
For glass substrate coating, customized to glass dimensions, positioning methods and equipment interfaces.
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Glass Coating Carrier (Vertical)
Vertical loading structure for display panels and related vacuum coating applications.
Explore ProductPerovskite Carriers
Carriers and fixtures for perovskite R&D and production equipment.
Perovskite Carriers
Carriers and fixtures for perovskite solar cell R&D and production equipment.
Explore Product02 / HEATING PRODUCTS
Heaters
Sheathed heaters, heater plates, heater cages and custom heating assemblies for vacuum chambers and semiconductor equipment.
Vacuum & Metal Heaters
Developed for vacuum chamber thermal fields, sealing and corrosion resistance.
Sheathed Heater
Tubular heating elements customized to power, shape, mounting interfaces and vacuum conditions.
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Metal Heater Plate
Integrated heating and temperature-sensing components for uniform thermal fields and precision temperature control.
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Friction-Welded Heater
Friction-welded enclosure balances heat transfer efficiency and structural reliability.
Explore ProductSemiconductor & Industrial Heating Assemblies
Wafer heater plates, heater cages and multi-zone sheet-metal heaters.
Semiconductor Wafer Heater Plate
For deposition and etching equipment, developed to chamber structures and wafer sizes.
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Heater Cage
Open heating structure for convenient installation and maintenance, with rapid heating and cooling.
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Sheet-Metal / Stainless-Steel Heater
Modular design based on temperature zones, power density and space constraints.
Explore ProductSpecialty Heater Plates
Specialty heater plates in aluminum and synthetic composite materials.
Aluminum Heater Plate A
Aluminum base with integrated machining for heating, temperature sensing and mounting interfaces.
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Aluminum Heater Plate B
Customized to drawings or operating conditions for different chambers and mounting arrangements.
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Synthetic Composite Heater Plate
Balances insulation, heat resistance and machinability for specialty heating assemblies.
Explore Product03 / CERAMIC COMPONENTS
Ceramic Components
Precision components in aluminum nitride, alumina, zirconia, silicon carbide and silicon nitride, customized to drawings and operating conditions.
Aluminum Nitride (AlN) Components
Thermal conductivity and electrical insulation for semiconductor thermal management and vacuum equipment.
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Alumina (Al₂O₃) Components
Wear-resistant, electrically insulating ceramics manufactured using established processes for precision equipment parts.
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Zirconia (ZrO₂) Components
High toughness and wear resistance for high-strength precision components.
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Silicon Carbide (SiC) Components
Heat resistance, corrosion resistance and high stiffness for demanding conditions.
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Silicon Nitride (Si₃N₄) Components
Thermal stability and mechanical performance for high-reliability components.
Explore Product04 / OTHER PRODUCTS & SERVICES
Other Products & Services
Water-cooled plates, spray plates, metal boats, gas distribution plates and surface coating services.
Water-Cooled Plate
Flow channels, seals, interfaces and integrated machining for equipment thermal management.
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Spray Plate
Precision machining to hole geometry, hole patterns, flatness and surface requirements.
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Metal Gas Distribution Plate
Dense micro-hole, flow-channel and sealing-structure machining for uniform gas distribution.
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Surface Coating
Alumina and yttria surface treatments, with processes selected for the operating environment.
Explore ProductCUSTOMIZED SOLUTIONS