Fixtures & Structural Components
Metal Gas Distribution Plate
Dense micro-hole, flow-channel and sealing-structure machining for uniform process gas distribution.
PRODUCT FEATURES
Features
- 01
Precision micro-hole and flow-channel machining
- 02
Design for uniform gas distribution
- 03
Custom seal and interface structures
APPLICATION
Applications
For vacuum process equipment including thin-film deposition and etching systems.
SPECIFICATIONS
Specifications
Information below is based on our published company brochure. Final specifications are subject to project drawings and technical confirmation.
- Customization
- Hole patterns, flow channels, seals and interfaces
- Manufacturing Capabilities
- Precision machining and surface treatment
- Inspection Capabilities
- Dimensional, cleanliness and sealing inspections
CUSTOMIZED SOLUTIONS