PECVD Carbon-Carbon Carriers
PECVD Carbon-Carbon Carrier (4-Section)
A four-section carbon-carbon carrier for higher loading capacity and stable support in large-format vacuum coating applications.
PRODUCT FEATURES
Features
- 01
High-strength carbon-carbon composite
- 02
Precision pocket machining with wafer-fit accuracy down to ±0.1 mm
- 03
Low thermal expansion and high-flatness design
APPLICATION
Applications
For high-volume loading in HJT solar cell PECVD coating equipment.
SPECIFICATIONS
Specifications
Information below is based on our published company brochure. Final specifications are subject to project drawings and technical confirmation.
- Overall Dimensions
- 2750 × 2680 mm
- Pocket Count
- 288 (210 half-cell format)
- Wafer Size
- 182 / 210 mm
- Flatness
- ±1.5 mm
- Reference Service Life
- ≥18 months
CUSTOMIZED SOLUTIONS