PVD Metal Carriers
PVD Metal Carrier (6-Section)
A six-section metal carrier for higher loading capacity, with structural design, precision machining and surface treatment services.
PRODUCT FEATURES
Features
- 01
Large-format modular structure
- 02
High flatness and stable loading
- 03
Custom chamber and automation interfaces
APPLICATION
Applications
For high-capacity PVD vacuum coating production lines.
SPECIFICATIONS
Specifications
Information below is based on our published company brochure. Final specifications are subject to project drawings and technical confirmation.
- Overall Dimensions
- 2750 × 2750 mm
- Pocket Count
- 288 (210 half-cell format)
- Wafer Size
- 182 / 210 mm
- Flatness
- ±1.5 mm
- Reference Service Life
- ≥18 months
CUSTOMIZED SOLUTIONS