PECVD Carbon-Carbon Carriers
PECVD Carbon-Carbon Carrier (2-Section)
Large-format carbon-carbon composite carriers for heterojunction solar cell PECVD coating equipment, balancing low weight, flatness and stability under vacuum conditions.
PRODUCT FEATURES
Features
- 01
High-strength carbon-carbon composite with heat and corrosion resistance
- 02
Precision-machined pockets for 182 / 210 mm wafers
- 03
Large-format design with low thermal expansion and high flatness
APPLICATION
Applications
For HJT solar cell PECVD coating equipment, customized to chamber dimensions, loading methods and automation interfaces.
SPECIFICATIONS
Specifications
Information below is based on our published company brochure. Final specifications are subject to project drawings and technical confirmation.
- Overall Dimensions
- 2030 × 2015 mm
- Pocket Count
- 162 (210 half-cell format)
- Wafer Size
- 182 / 210 mm
- Flatness
- ±1 mm
- Reference Service Life
- ≥18 months
CUSTOMIZED SOLUTIONS