PVD Metal Carriers
PVD Metal Carrier (4-Section)
Large-format metal carriers for PVD coating, customized to chamber dimensions, wafer formats and loading methods.
PRODUCT FEATURES
Features
- 01
Large-format, high-flatness composite carrier design
- 02
Balances structural strength and loading efficiency
- 03
Custom equipment interfaces and automated loading and unloading
APPLICATION
Applications
For photovoltaic cell PVD vacuum coating equipment.
SPECIFICATIONS
Specifications
Information below is based on our published company brochure. Final specifications are subject to project drawings and technical confirmation.
- Overall Dimensions
- 2317 × 2150 mm
- Pocket Count
- 160 (210 half-cell format)
- Wafer Size
- 182 / 210 mm
- Flatness
- ±1.5 mm
- Reference Service Life
- ≥18 months
CUSTOMIZED SOLUTIONS